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Integration of thin film bulk acoustic resonators onto flexible liquid crystal polymer substrates

✍ Scribed by R.V. Wright; G. Hakemi; P.B. Kirby


Book ID
104052893
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
569 KB
Volume
88
Category
Article
ISSN
0167-9317

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Automated on-wafer extraction of equival
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## Abstract On‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from exp