Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

✍ Scribed by Campanella, Humberto; Esteve, Jaume; Montserrat, Josep; Uranga, Arantxa; Abadal, Gabriel; Barniol, Nuria; Romano-Rodríguez, Albert

• Book ID: 121397131
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 399 KB
• Volume: 89
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2234305