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Effects of cation diffusion during chemical beam etching

✍ Scribed by T.H. Chiu; W.T. Tsang; M.D. Williams; C.A.C. Mendonça; K. Dreyer; F.G. Storz

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 753 KB
Volume: 150
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(95)80270-m

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