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Effect of chemical reaction stoichiometry on the pressure variations in the etching chamber during etching of aluminium

✍ Scribed by V. Martišovitš; M. Zahoran; I. Košinár; J. Trnovec

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
191 KB
Volume
173
Category
Article
ISSN
0375-9601

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