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Effects of buried oxide layer on indium diffusion in separation by implantation of oxygen

✍ Scribed by Chen, Peng; Zhu, Ming; Fu, Ricky K. Y.; Chu, Paul K.; An, Zhenghua; Liu, Weili; Montgomery, Neil; Biswas, Sukanta

Book ID
118744512
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
399 KB
Volume
96
Category
Article
ISSN
0021-8979

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