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An attempt to make a buried layer of indium in aluminium by ion implantation

✍ Scribed by N. Kruse; G. Dybkjær; A. Johansen; K.K. Bourdelle; E. Johnson

Book ID: 113287128
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 446 KB
Volume: 118
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)01082-3

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