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Formation of buried oxide layers in titanium by high-fluence oxygen ion implantation

✍ Scribed by C. Hammerl; Y. Bohne; W. Assmann; K. Helming; B. Rauschenbach


Book ID
114167243
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
930 KB
Volume
206
Category
Article
ISSN
0168-583X

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