𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Effects of adsorbates on step coverage in TiN chemical vapor deposition

✍ Scribed by Y. Ohshita; W. Fukagawa; A. Kobayashi


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
316 KB
Volume
146
Category
Article
ISSN
0022-0248

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES