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Effect of filament temperature on the chemical vapor deposition of fluorocarbon–organosilicon copolymers

✍ Scribed by Shashi K. Murthy; Bradley D. Olsen; Karen K. Gleason

Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 178 KB
Volume: 91
Category: Article
ISSN: 0021-8995
DOI: 10.1002/app.13342

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