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Effective plasma confinement by applying multipolar magnetic fields in an internal linear inductively coupled plasma system

โœ Scribed by Kim, Kyong Nam; Kim, Mi Suk; Yeom, Geun Young


Book ID
121331788
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
489 KB
Volume
88
Category
Article
ISSN
0003-6951

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