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Effect of swirl and confinement on the flow and temperature fields in an inductively coupled r.f. plasma

✍ Scribed by Maher I. Boulos; Ronald Gagne; Ramon M. Barnes


Book ID
112054273
Publisher
John Wiley and Sons
Year
1980
Tongue
English
Weight
878 KB
Volume
58
Category
Article
ISSN
0008-4034

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## Abstract Titanium dioxide (TiO~2~) films are produced by inductively coupled plasma‐assisted (ICP) CVD at various H~2~ flow rates. Anatase and rutile TiO~2~ films are obtained without any external heating. The surface morphologies, structures, and deposition rates of the TiO~2~ films are strongl