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The dependence of coating in inductive R.F. plasmas on gas flow velocity, pressure and R.F. power

✍ Scribed by Y.L. Khait; A. Inspektor; R. Avni

Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 547 KB
Volume: 72
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(80)90006-1

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