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Characterization of pyrolytic carbon deposited on graphite substrates in inductive R.F. plasmas of propylene and argon

✍ Scribed by A. Inspektor; Y. Hornik; U. Carmi; R. Avni; E. Wallura; H. Hoven; K. Koizlik; H. Nickel


Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
308 KB
Volume
72
Category
Article
ISSN
0040-6090

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