✦ LIBER ✦

Dependence of the hardness of titanium nitride prepared by plasma chemical vapour deposition on the gas flow rate and the r.f. power

✍ Scribed by Ryogi Makabe; Sadao Nakajima; Osamu Tabata; Masaki Aoki

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The dependence of coating in inductive R

✍ Y.L. Khait; A. Inspektor; R. Avni 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 547 KB

Synthesis of cubic BN from the gas phase

✍ Yukio Ichinose; Hidetoshi Saitoh; Yoshihiko Hirotsu 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 666 KB

Effect of mixing oxygen or diborane on t

✍ C.R. Aiyer; S.A. Gangal; K. Montasser; S. Morita; S. Hattori 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 221 KB

The influence of preparation parameters

✍ G Myburg; R Swanepoel 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 755 KB