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Effect of ultraviolet light irradiation on amorphous carbon nitride films

✍ Scribed by M. Zhang; Y. Nakayama

Book ID: 125842561
Publisher: American Institute of Physics
Year: 1997
Tongue: English
Weight: 245 KB
Volume: 82
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.366356

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