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Effect of thermal treatment on structure and properties ofa-Si:H films obtained by cyclic deposition

✍ Scribed by V. P. Afanas’ev; A. S. Gudovskikh; V. N. Nevedomskii; A. P. Sazanov; A. A. Sitnikova; I. N. Trapeznikova; E. I. Terukov


Book ID
110129466
Publisher
Springer
Year
2002
Tongue
English
Weight
155 KB
Volume
36
Category
Article
ISSN
1063-7826

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It has been observed that Cu,S films with a high sulphur content (X < 1.9) transform into the chalcocite phase (3~ > 1.99) after undergoing thermal treatment at 170 "c under vacuum, following evaporation of a thin copper film of 80 -120 A thickness. Similar treatments in an oxygen atmosphere, or in