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Structure and properties ofa-Si:H films grown by cyclic deposition

✍ Scribed by V. P. Afanas’ev; A. S. Gudovskikh; O. I. Kon’kov; M. M. Kazanin; K. V. Kougiya; A. P. Sazanov; I. N. Trapeznikova; E. I. Terukov

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