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Effect of the substrate temperature on the physical characteristics of amorphous carbon films deposited by d.c. magnetron sputtering

✍ Scribed by Mounier, E.; Bertin, F.; Adamik, M.; Pauleau, Y.; Barna, P.B.


Book ID
123016444
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
824 KB
Volume
5
Category
Article
ISSN
0925-9635

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