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Effect of substrate–target distance and sputtering pressure in the synthesis of AlN thin films

✍ Scribed by G. F. Iriarte; J. G. Rodriguez; F. Calle

Publisher: Springer-Verlag
Year: 2011
Tongue: English
Weight: 331 KB
Volume: 17
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-010-1198-2

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