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The effect of gallium concentration and substrate temperature on the properties of Ga-Doped ZnO thin films sputtered from powder compacted target

โœ Scribed by Kyoo Ho Kim; Eric Arifin


Publisher
TechnoPress
Year
2007
Tongue
English
Weight
780 KB
Volume
13
Category
Article
ISSN
1598-9623

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Effect of magnesium doping on the struct
โœ Walter Water; Yin-Shiang Yan; Teen-Hang Meen ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 504 KB

Structural and piezoelectric characteristics of magnesium-doped ZnO films were investigated. Magnesium-doped ZnO films with a c-axis preferred orientation were deposited on ST-cut quartz by radio frequency magnetron sputtering. The crystalline structure and surface morphology of films were studied b