✦ LIBER ✦

Effect of substrate temperature on the adhesion properties of magnetron sputtered nano-composite Si–C–N hard thin films

✍ Scribed by S.K. Mishra; A.S. Bhattacharyya

Book ID: 113791258
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 525 KB
Volume: 62
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2007.05.043

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The effect of Ta to Si ratio on magnetro

The effect of Ta to Si ratio on magnetron sputtered Ta-Si-N thin films

✍ J. O. Olowolafe; I. Rau; K. M. Unruh; C. P. Swann; Z. Jawad; T. Alford 📂 Article 📅 1999 🏛 Springer US 🌐 English ⚖ 137 KB

The effect of substrate temperature on t

The effect of substrate temperature on the properties of d.c. reactive magnetron sputtered titanium oxide films

✍ Li-jian Meng; M. Andritschky; M.P. dos Santos 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 740 KB

Effect of substrate temperature on the p

Effect of substrate temperature on the physical properties of dc magnetron sputtered Cu2O films

✍ Sivasankar Reddy, A. ;Sreedhara Reddy, P. ;Uthanna, S. ;Venkata Rao, G. ;Klein, 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 393 KB

## Abstract Cuprous oxide (Cu~2~O) films were formed by dc reactive magnetron sputtering onto glass substrates held at various temperatures in the range 303–648 K. The substrate temperature was found to be an important parameter in controlling the physical properties of the deposited films. The var

Effect of substrate temperature on the p

Effect of substrate temperature on the physical properties of dc magnetron sputtered CuAlO2 films

✍ A. Sivasankar Reddy; Hyung-Ho Park; G. Mohan Rao; S. Uthanna; P. Sreedhara Reddy 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 657 KB

Annealing effect on microstructure and m

Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti–Si–C thin film

✍ Chen, Z S; Li, H J; Fu, Q G; Yang, D; Shen, Q L 📂 Article 📅 2013 🏛 Institute of Materials, Minerals and Mining 🌐 English ⚖ 312 KB

Effect of substrate temperature on the p

Effect of substrate temperature on the properties of copper nitride thin films deposited by reactive magnetron sputtering

✍ Cho, Shinho 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 608 KB