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Effect of strain-temperature stress on MOS structure with ultra-thin gate oxide

✍ Scribed by Chia-Nan Lin; Yi-Lin Yang; Wei-Ting Chen; Shang-Chih Lin; Kai-Chieh Chuang; Jenn-Gwo Hwu


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
872 KB
Volume
85
Category
Article
ISSN
0167-9317

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Degradation of ultra-thin gate oxide n-MOSFET with halo structure is studied under different stress modes with the increase of reverse substrate bias. The variation of device degradation is characterized by monitoring the substrate current during stress. When the gate voltage is smaller than a criti