Effect of sputtering power on microstructure of dielectric ceramic thin films by RF magnetron sputtering method using (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3as target
β Scribed by Feng Shi
- Publisher
- Springer US
- Year
- 2011
- Tongue
- English
- Weight
- 634 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0957-4522
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Structure and electrical properties of Ce-doped Ba(Zr x Ti 1Γx )O 3 (BCZT) thin films with the mole fraction of x ΒΌ 0:2 and the thickness of about 100 nm have been investigated. Ce-doped BZT films were prepared on Pt/Ti/SiO 2 /Si substrates by a RF magnetron sputtering system. X-ray diffraction patt