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Effects of oxygen to argon ratio on Ba(Zr0.2Ti0.8)O3thin films prepared by RF magnetron sputtering

✍ Scribed by Bo Wang; Chuan-ren Yang; Hong-wei Chen; Ji-hua Zhang; An Yu; Rui-ting Zhang


Publisher
Springer US
Year
2008
Tongue
English
Weight
350 KB
Volume
20
Category
Article
ISSN
0957-4522

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Bulk (Zr ,Sn )TiO ceramics have shown excellent dielectric properties at microwave frequencies; 0.8 0.2 4 however, the high sintering temperature of the bulk materials is the major obstacle in their use as dielectric resonators to miniaturize microwave circuits. It was possible to obtain highly orie