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Effect of rapid thermally nitrided titanium films contacting silicided and nonsilicided junctions

โœ Scribed by S. Chittipeddi; C. M. Dziuba; V. C. Kannan; M. J. Kelly; W. T. Cochran; B. Rambabu


Book ID
112901449
Publisher
Springer US
Year
1993
Tongue
English
Weight
1014 KB
Volume
22
Category
Article
ISSN
0361-5235

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