✦ LIBER ✦
7325. Oxygen impurity effects on the formation of thin titanium silicide films by rapid thermal annealing: M Heintze et al, J Phys. D: Appl Phys, 23, 1990, 1076–1081
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 303 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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