Zinc oxide epilayers grown by metal organic vapour phase epitaxy on (0 0 0 1) sapphire substrates were doped with Praseodymium and Europium by ion implantation. The as-implanted samples were either annealed in air for 20 min in a tube furnace or rapid thermal annealing (RTA) was performed, for 2 min
✦ LIBER ✦
Effect of rapid thermal annealing on Zn/ZnO layers
✍ Scribed by Qiang Xu, Rui La, Qijin Cheng, Zifeng Zhang…
- Book ID
- 120681690
- Publisher
- Springer US
- Year
- 2013
- Tongue
- English
- Weight
- 415 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0957-4522
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