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Rapid Thermal Annealing of ZnO Nanocrystalline Films for

โœ Scribed by M. C. Kao; H. Z. Chen; S. L. Young; C. Y. Kung; C. C. Lin; J. Z. Lai

Publisher
Springer
Year
2010
Tongue
English
Weight
217 KB
Volume
23
Category
Article
ISSN
0896-1107

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Zinc oxide epilayers grown by metal organic vapour phase epitaxy on (0 0 0 1) sapphire substrates were doped with Praseodymium and Europium by ion implantation. The as-implanted samples were either annealed in air for 20 min in a tube furnace or rapid thermal annealing (RTA) was performed, for 2 min