𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Effect of plasma parameters on the structure of CNx layers deposited by DC magnetron sputtering

✍ Scribed by Ujvári, T.; Szikora, B.; Mohai, M.; Tóth, A.; Keresztury, G.; Bertóti, I.

Book ID
121466855
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
119 KB
Volume
11
Category
Article
ISSN
0925-9635

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Deposition temperature effects on the ch
Deposition temperature effects on the characteristics of a-Si:H deposited by pulsed DC magnetron sputtering
✍ Cherfi, R. ;Abdelmoumene, A. ;Kechouane, M. ;Rahal, A. ;Aoucher, M. ;Mohammed-Br 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 637 KB

## Abstract In this study, the deposition temperature effects on the properties of hydrogenated amorphous silicon films are reported. The a‐Si:H thin films were deposited by DC magnetron sputtering technique, according to a new protocol of deposition. This last consists of a successively several th