✦ LIBER ✦

Effect of oxygen to argon ratio on properties of (Ba,Sr)TiO[sub 3] thin films prepared by radio-frequency magnetron sputtering

✍ Scribed by Tsai, M. S.; Sun, S. C.; Tseng, T. Y.

Book ID: 121816528
Publisher: American Institute of Physics
Year: 1997
Tongue: English
Weight: 348 KB
Volume: 82
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.365665

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical and structural properties of (Ba

Optical and structural properties of (Ba, Sr)TiO3 thin films grown by radio-frequency magnetron sputtering

✍ Y. P. Wang; T. Y. Tseng 📂 Article 📅 1999 🏛 Springer 🌐 English ⚖ 118 KB

Influence of Oxygen to Argon Ratio on th

Influence of Oxygen to Argon Ratio on the Properties of RF Magnetron Sputtered Ba0.7Sr0.3TiO3 Thin Films

✍ Reshmi, R.; Jayaraj, M. K.; Sebastian, M. T. 📂 Article 📅 2011 🏛 The Electrochemical Society 🌐 English ⚖ 682 KB

Structural and optical properties of Ba[

Structural and optical properties of Ba[sub x]Sr[sub 1−x]TiO[sub 3] thin films on indium tin oxide/quartz substrates prepared by radio-frequency magnetron sputtering

✍ Leng, W. J.; Yang, C. R.; Zhang, J. H.; Chen, H. W.; Ji, H.; Fu, C. L.; Liao, J. 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 617 KB

Effects of oxygen to argon ratio on Ba(Z

Effects of oxygen to argon ratio on Ba(Zr0.2Ti0.8)O3thin films prepared by RF magnetron sputtering

✍ Bo Wang; Chuan-ren Yang; Hong-wei Chen; Ji-hua Zhang; An Yu; Rui-ting Zhang 📂 Article 📅 2008 🏛 Springer US 🌐 English ⚖ 350 KB

High dielectric tunability of Ba0.6Sr0.4

High dielectric tunability of Ba0.6Sr0.4TiO3 thin film deposited by radio-frequency magnetron sputtering

✍ Zuyong Feng; Wei Chen; Ooi Kiang Tan 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 275 KB

Effect of deposition temperature on the

Effect of deposition temperature on the microstructure and dielectric properties of Ba0.6Sr0.4TiO3thin film deposited by radio-frequency magnetron sputtering

✍ Feng, Zuyong ;Chen, Wei ;Tan, Ooi Kiang 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 322 KB

## Abstract Ba~0.6~Sr~0.4~TiO~3~ (BST) thin films with the thickness of 300 nm were deposited on Pt/SiO~2~/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substra