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Effect of nitridation on polarity, microstructure, and morphology of AlN films

โœ Scribed by Wu, Y.; Hanlon, A.; Kaeding, J. F.; Sharma, R.; Fini, P. T.; Nakamura, S.; Speck, J. S.


Book ID
120010526
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
783 KB
Volume
84
Category
Article
ISSN
0003-6951

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