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Effect of thermal annealing on the microstructure and morphology of erbium films

✍ Scribed by H.H. Shen; S.M. Peng; X.G. Long; X.S. Zhou; L. Yang; K. Sun; X.T. Zu

Book ID
113937746
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
596 KB
Volume
520
Category
Article
ISSN
0040-6090

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Effects of thermal annealing on the morphology of the Al x Ga (1 Γ€ x) N films with two different high Al-contents (x =0.43 and 0.52) have been investigated by atomic force microscopy (AFM). The annealing treatments were performed in a nitrogen (N 2 ) gas ambient as short-time (4 min) and long-time (