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Effect of native point defects on morphology of gettering centres in CZ-silicon wafers

✍ Scribed by K.L. Enisherlova; T.F. Rusak; M.G. Mil'vidskii; V.J. Reznick


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
381 KB
Volume
36
Category
Article
ISSN
0921-5107

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