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Effect of N2/Ar on structure and hardness of TaN-Ag thin films deposited by DC cylindrical magnetron sputtering

✍ Scribed by Foadi, Farnaz; Darabi, Elham; Reza Hantehzadeh, Mohammad

Book ID: 125396614
Publisher: Springer-Verlag
Year: 2014
Tongue: English
Weight: 912 KB
Volume: 129
Category: Article
ISSN: 2190-5444
DOI: 10.1140/epjp/i2014-14080-8

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