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Effect of O2/Ar Mixture on the Structural and Optical Properties of ZnO Thin Films Fabricated by DC Cylindrical Magnetron Sputtering

โœ Scribed by M. R. Hantehzadeh; P. Salavati Dezfooli; S. A. Hoseini

Book ID
113070931
Publisher
Springer
Year
2011
Tongue
English
Weight
564 KB
Volume
31
Category
Article
ISSN
0164-0313

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ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph