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Effect of microstructure on the arsenic profile in implanted silicon

✍ Scribed by W.A. Coghlan; M.H. Rhee; J.M. Williams; L.A. Streit; P. Williams

Book ID: 113277448
Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 637 KB
Volume: 16
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(86)90009-1

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