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Effect of Ion Energy on Structure and Composition of Cathodic Arc Deposited Alumina Thin Films

✍ Scribed by Johanna Rosén; Stanislav Mráz; Ulrich Kreissig; Denis Music; Jochen M. Schneider

Publisher
Springer
Year
2005
Tongue
English
Weight
370 KB
Volume
25
Category
Article
ISSN
0272-4324

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