Influence of Gas Entry Point on Plasma Chemistry, Ion Energy and Deposited Alumina Thin Films in Filtered Cathodic Arc

✍ Scribed by J. Rosen; P. O. Å. Persson; M. Ionescu; J. Pigott; D. R. McKenzie; M. M. M. Bilek

• Publisher: Springer
• Year: 2007
• Tongue: English
• Weight: 395 KB
• Volume: 27
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1007/s11090-007-9088-9