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Effect of interface modification on EM-induced degradation mechanisms in copper interconnects

โœ Scribed by E. Zschech; M.A. Meyer; S.G. Mhaisalkar; A.V. Vairagar; A. Krishnamoorthy; H.J. Engelmann; V. Sukharev


Book ID
108289182
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
295 KB
Volume
504
Category
Article
ISSN
0040-6090

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