๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Effect of heat treatment on ITO film properties and ITO/p-Si interface

โœ Scribed by R. Balasundaraprabhu; E.V. Monakhov; N. Muthukumarasamy; O. Nilsen; B.G. Svensson

Book ID
113782966
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
472 KB
Volume
114
Category
Article
ISSN
0254-0584

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Effects of post-thermal treatment on the
Effects of post-thermal treatment on the properties of rf reactive sputtered ITO films
โœ D.K. Maurya ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 581 KB

Indium tin oxide (ITO) thin film prepared by rf sputtering at various Ar-O 2 mixtures, were annealed at several temperatures. The electrical, optical and structural properties of the film were systematically investigated before and after post-thermal treatment. The influence of a reactive gas (O 2 )