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Grain size control in ITO targets and its effect on electrical and optical properties of deposited ITO films

✍ Scribed by Xu, Jiwen; Yang, Zupei; Zhang, Xiaowen; Wang, Hua; Xu, Huarui

Book ID
121559793
Publisher
Springer US
Year
2013
Tongue
English
Weight
847 KB
Volume
25
Category
Article
ISSN
0957-4522

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## Abstract Indium tin oxide (ITO) thin films (In/Sn = 90:10) prepared by the sol–gel dip‐coating process on glass substrates, followed by annealing in air in the temperature range 150–550 °C were studied. Overall the films structure, surface roughness, and electrical performances are improved, lea