Effect of annealing on electrical, structural, and optical properties of sol-gel ITO thin films
β Scribed by Hammad, Talaat Moussa
- Publisher
- John Wiley and Sons
- Year
- 2009
- Tongue
- English
- Weight
- 354 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0031-8965
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β¦ Synopsis
Abstract
Indium tin oxide (ITO) thin films (In/Snβ=β90:10) prepared by the solβgel dipβcoating process on glass substrates, followed by annealing in air in the temperature range 150β550βΒ°C were studied. Overall the films structure, surface roughness, and electrical performances are improved, leading to electrical resistivity fifth order of magnitude larger than before annealing and a more compact and crystalline films, translated by a preferential orientation in the (111) direction. Besides that, the films are highly transparent in the visible range, where it shows an average transmittance of 92.3% after annealing to 550βΒ°C. The allowed direct band gap at temperature range 150β550βΒ°C was estimated to be 3.32β4.21βeV, increasing as the annealing temperature also increases.
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