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Effect of free surface and interface on thermal annealing of dislocation loops in silicon

✍ Scribed by Narayan, J.; Jagannadham, K.

Book ID: 119967739
Publisher: American Institute of Physics
Year: 1987
Tongue: English
Weight: 651 KB
Volume: 62
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.339594

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