✦ LIBER ✦
Thermal optimization of CZ bulk growth and wafer annealing for crystalline dislocation-free silicon
✍ Scribed by A.I. Prostomolotov; N.A. Verezub; M.V. Mezhennii; V.Ya. Reznik
- Book ID
- 108166257
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 305 KB
- Volume
- 318
- Category
- Article
- ISSN
- 0022-0248
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