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Effect of force control algorithms on the scanning probe microscope lithography system

✍ Scribed by Yen, Jia-Yush; Lin, I-Ming; Lee, Chih-Kung

Book ID: 118155738
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 529 KB
Volume: 76
Category: Article
ISSN: 0034-6748
DOI: 10.1063/1.1863932

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