✦ LIBER ✦
Nanometer scale lithography at high scanning speeds with the atomic force microscope using spin on glass
✍ Scribed by Park, S. W.; Soh, H. T.; Quate, C. F.; Park, S.‐I.
- Book ID
- 111926793
- Publisher
- American Institute of Physics
- Year
- 1995
- Tongue
- English
- Weight
- 417 KB
- Volume
- 67
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.114565
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