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Effect of electron-ion bombardment on the growth of dielectric films in reactive sputtering

✍ Scribed by L. R. Bitner; V. A. Vedernikov; T. I. Danilina; G. V. Manyakhina; Z. A. Shandra


Book ID
112425129
Publisher
Springer
Year
1976
Tongue
English
Weight
410 KB
Volume
19
Category
Article
ISSN
1573-9228

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