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Effect of hydrogen ion bombardment on the characteristics of TiC films formed by the ion beam sputtering method

โœ Scribed by O. Machida; J. Nagata; N. Noto; K. Mori


Book ID
113281940
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
356 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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