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Effect of chemical preoxidation treatment on the structure of SiO2Si interfaces

✍ Scribed by Hiroshi Nohira; Hiroaki Sekikawa; Masanori Matsuda; Takeo Hattori


Book ID
108418278
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
371 KB
Volume
104-105
Category
Article
ISSN
0169-4332

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