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On the SiOx transition layer in abrupt Si-SiO2 chemical interface in MOS structures

✍ Scribed by J. Suñé; I. Placencia; N. Barniol; E. Farrés; X. Aymerich

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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On the SiSiO2 interface roughness in VL

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Radiation-Induced Trivalent Silicon Defe

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Dependence of the Si-SiO2 barrier height

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